JW-VM01(JY11) The capacitive vacuum pressure gauge is designed for accurate low vacuum pressure measurement in demanding industrial and scientific applications. Based on metal capacitive sensing technology and a nickel alloy diaphragm, it provides stable linear output, fast response, corrosion resistance, and reliable performance in semiconductor, PECVD, plasma sterilization, nuclear, and vacuum coating processes.
2. Product Overview
JW-VM01(JY11) This metal capacitive vacuum pressure gauge uses a nickel alloy diaphragm welded between two electrode ends. When vacuum pressure changes, the diaphragm deformation causes a distance change between the diaphragm and electrode, generating a linear capacitance variation. Through dedicated signal conditioning, amplification, linearization, and anti-interference processing, the capacitance signal is converted into a standard voltage output for process monitoring and control.
With stainless steel housing, nickel alloy diaphragm, wide operating temperature range, and high stability, this vacuum pressure sensor is suitable for applications requiring precise and repeatable low pressure measurement under harsh process conditions.
Parameter
Specification
Product Type
Metal capacitive vacuum pressure gauge
Measuring Range
0 to 1 Torr 0 to 10 Torr 0 to 100 Torr 0 to 1000 Torr
Power Supply
15 to 30 VDC
Output Signal
0 to 10 VDC 0 to 5 VDC
Accuracy
0.2%FS 0.5%FS 1.0%FS at 25°C
Compensation Temperature
0 to 50°C
Media Temperature
-20 to 80°C
Storage Temperature
-40 to 85°C
Temperature Drift
≤0.04%FS per °C
Stability
0.5%FS per year
Response Time
≤20 ms
Measuring Medium
Gas compatible with nickel alloy
Housing Material
304SS
Diaphragm Material
Nickel alloy
Current Consumption
≤10 mA
Output Load
>10K Ω
Electrical Connection
See wiring option
Process Connection
See outline drawing
3. Typical Model Configuration
Item
Configuration
Product Model
WM01 metal capacitive vacuum pressure gauge
Range
0 to 10 Torr
Output
0 to 10 VDC
Power Supply
15 to 30 VDC
Process Connection
KF16
Electrical Connector
DB 15
3. Application Scenarios
Semiconductor processing chambers
PECVD process control Plasma sterilizers
Nuclear industry vacuum systems
Vacuum coating equipment
Low vacuum process monitoring
Laboratory vacuum systems
Industrial vacuum control equipment
FAQ
Q
1. What is a capacitive vacuum pressure gauge used for?
A
A capacitive vacuum pressure gauge is used to measure low vacuum pressure in process systems such as semiconductor chambers, PECVD equipment, plasma sterilizers, vacuum coating machines, and industrial vacuum control systems.
Q
2. What pressure ranges are available for this vacuum gauge?
A
Available ranges include 0 to 1 Torr, 0 to 10 Torr, 0 to 100 Torr, and 0 to 1000 Torr. The 0 to 10 Torr version is commonly used for precise low vacuum process monitoring.
Q
3. What output signals does this vacuum pressure gauge support?
A
The gauge supports standard voltage output options including 0 to 10 VDC and 0 to 5 VDC, making it suitable for PLC, controller, and data acquisition system integration.
Q
4. Can JW-IoT provide this capacitive vacuum gauge for OEM projects?
A
Yes. JW-IoT can support OEM and project-based supply for capacitive vacuum pressure gauges, including range selection, output configuration, process connection, and application matching.
Q
5. Is the sensor suitable for corrosive gas environments?
A
The measuring medium should be gas compatible with nickel alloy. For corrosive or special process gases, material compatibility should be confirmed before selection.
Q
6. What is the response time of this vacuum gauge?
A
The response time is ≤20 ms, which allows fast vacuum pressure monitoring and process control.
Q
7. Does JW-IoT support integration with monitoring systems?
A
Yes. JW-IoT can provide sensor selection support and help match the vacuum gauge with data acquisition systems, controllers, or industrial monitoring platforms.
Q
8. What materials are used in the gauge?
A
The housing is made of 304 stainless steel, and the diaphragm is made of nickel alloy for stable vacuum sensing performance.
Q
9. Why choose JW-IoT for vacuum pressure measurement products?
A
JW-IoT provides industrial sensing products and solution support for process monitoring, automation, and IoT-based data collection, helping customers select suitable sensors for reliable system integration.
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